2023年10月27日 · EUV light refers to the extreme ultraviolet light used for microchip lithography, which involves coating the microchip wafer in a photosensitive material and carefully exposing it to light.

Providing high resolution in high-volume manufacturing, ASML’s extreme ultraviolet (EUV) lithography systems are pushing Moore’s Law forward. Discover our NXE systems that use EUV light to deliver high-resolution lithography and make mass production of the world’s most advanced microchips possible.

2024年11月28日 · Extreme ultraviolet lithography (EUVL) was recently adopted by the semiconductor industry as the leading-edge lithography technique for continued miniaturization of semiconductor devices in...

2021年10月5日 · Extreme ultraviolet (EUV) lithography is a soft X-ray technology, which has a wavelength of 13.5nm. Today’s EUV scanners enable resolutions down to 22nm half-pitch. In a system, an EUV light source makes use of a high power laser to create a plasma.

Advantages of EUV lithography are wide process windows, high throughput (once source power and availability specs are met), and extendibility. Disadvantages of EUV lithography are higher costs & complexity (than ArFi lithography) and infrastructure immaturity.

EUV stands for "extreme ultraviolet" light. The light visible to humans has wavelengths between 400 and 800 nanometers. The range of ultraviolet light begins below 400 nanometers. The leading lithography process to date using "deep ultraviolet light" (DUV) operates at a wavelength of 193 nanometers.

2021年11月16日 · Welcome to the Center for Extreme Ultraviolet Science and Technology – an Engineering Research Center (ERC) exploring the development of compact coherent extreme ultraviolet (EUV) sources and their applications in challenging scientific …

A global leader in the production of at-wavelength extreme ultraviolet (EUV) metrology tools, EUV Tech supplies the semiconductor manufacturing industry with leading-edge metrology solutions using extreme ultraviolet light and soft-x-ray technology.

2025年1月3日 · EUV lithography is crucial for semiconductor manufacturing, with resolution affecting circuit size, performance and energy efficiency; however, it is also a highly energy-intensive process.

2024年10月17日 · Extreme Ultraviolet Lithography (EUV) represents a pivotal advancement in this realm. EUV lithography uses light at a wavelength of approximately 13.5 nm. This has enabled chip makers to reach the 7 nm, 5 nm, 3 nm, and 2 nm nodes.